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Excimer Lasers

KrF, ArF, XeCl Excimer lasers from GSI Lumonics for marking, drilling, material processing , Fiber Bragg Grating WritingLightMachinery Excimer Lasers are designed for a wide variety of advanced applications in precision manufacturing and R&D. Micro-machining of polymer and ceramic materials for electronic and medical devices, wire stripping and marking, writing of Fiber-Bragg gratings, pulsed laser deposition (PLD), chemical vapour deposition (CVD), Lidar, photo-resist exposure and photolysis are all common uses for these lasers. Previously produced by GSI Lumonics, these lasers are now developed, manufactured, sold and supported by LightMachinery’s team of engineers and scientists, many of whom have more than twenty years of excimer laser experience.

LightMachinery has established global partnerships with leading distributors and systems integrators that allow us to provide world-class laser and process support to our customers wherever they may be located.

PulseMaster-800 Series
The PulseMaster excimer lasers are designed for medium industrial or R&D applications requiring high power or high energy operation at any of the 193, 248, 308, 351 nm excimer laser wavelengths. The feature highly uniform beam properties, stable energy characteristics and extremely precise pointing stability.
Total Metal Ceramic, TMC™, construction provides for long gas lifetimes and low operating costs. Powerful micro-processor controls stabilize laser output and automate all routine maintenance operations. Standard applications include the manufacture of fiber Bragg gratings for DWDM applications, ablative machining of polymer layers used in flex circuits, micro-machining of hard materials such as ceramics and nitrides, patterning of thin metal layers and machining of medical device plastic components such as catheters and wires.
 more...

IPEX-800 Series
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance. Incorporating LightMachinery’s proprietary ICON™ (Integrated Ceramic on Nickel) technology, IPEX lasers offer long gas lifetimes, superior optical stability and precise control of laser operating parameters. EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance. Easy to use, simple to service and economical to operate, IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today. The marking of ceramics shown above is one of many applications for these versatile industrial tools. more...

High Brightness "Unstable Resonator" Optics
Unstable resonator optics
are available to provide low beam divergence for applications requiring long distance propagation of the beam or the highest focussability. The beam is flat topped in both axes, with no occlusions, with a divergence of <300 microradians. A significant improvement in spatial coherence (>1mm) is also obtained. This is beneficial in applications involving the use of diffractive optics (e.g. FBG writing, DOE hole drilling).. More...

 

Excimer Laser Applications
Hard disk drive wire stripping
Typical of excimer laser stripping of fine gauge wires for hard disk drives. Very clean insulation removal, no loose particles and no damage to the core conductor. This is a gold/copper 47 gage wire, 50 microns in diameter with 8 microns of polyurethane insulation.
Excimer laser wire stripping
Heavier Gage wire stripping. 14 gage wire, 2mm in diameter, insulation 12 microns thick. Wire has been stripped only from one side a common requirement that is easily accomplished with the excimer laser.
Excimer Laser Ceramic chip capaciitor marking
Ceramic chip capacitor marking, very small character sizes, high throughput, good contrast on most ceramics. Excimer marking is normally integrated into an automated test handler.
Excimer laser drilled holes in an Ink jet nozzle
An excellent example of the quality and precision achieved by the excimer laser drilling plastic. This is 75 micron thick polyimide with 50 micron diameter holes.
Excimer laser wire marking
Aerospace wire marking for Tefzel and Teflon wire. The excimer laser marks are high contrast permanent marks that cannot be removed with solvents. No reduction in insulation strength.
Excimer laser stripping of gold pads
Very precise stripping from gold contact pads using an IPEX laser with a highly specialized Offner projection lens to pattern around a dozen devices in one go, with step & repeat for rows of devices. Edges are precise to <1.5µm, and note lack of debris using Coax He nozzle.
Excimer laser machining in PI
Test pattern machined with IPEX in Polyimide, bar width is 20µm, credit Olaf Krüger, FBH, Berlin
Excimer laser slits in PC
8µm width and 8µm pitch grooves in polycarbonate
Excimer laser catheter slit
Catheter slit is a 20 µm wide groove machined though a conductive coating along the length of a 1.8m catheter. There were 4 grooves milled simultaneously and rigorously at 90° by splitting the IPEX beam in 4
Excimer laser alignment grooves
Fibre location grooves machined in PMMA using a PM848 at 193nm. Credit to Kris Naessens of INTEC for the photo
Excimer laser machined znse lens array
ZnSe lens array, pitch 6µm, using MAS300 workstation with an IPEX series eximcer laser. Credit to P Gailly, Centre Spatial de Liège, Belgium.
Excimer laser wire stripping
Wire stripping of multiple wires, 50um wire diameter, Polyimide insulation
Excimer laser wire stripping
Stripping a single 50um wire with polyimide insulation
Excimer laser wire stripping
Spiral slots in a Polyimide tube(prototype polymer stent) around 0.8mm dia.
Excimer laser wire stripping
Example of microlens array, 90x50µm lenslets in PC by Optec OG technique.
Excimer laser glass marking
Applications include marking on contact lenses, flat panel displays. Mark shown here is typical of 2D matrix codes used on flat panel displays and other high value glass substrates. Glass marks are achieved using the excimer laser at 193nm. Dot size is 100 microns
Fiber bragg grating diagram
Fiber Bragg Gratings (FBGs ) are narrowband reflection filters written permanently into the core of single mode fibers. Wavelength-selective fibers for telecommunications (DWDM) and smart sensors. Normally done with a KrF or ArF excimer laser operating with unstable resonator optics.
GSI Lumonics Excimer lasers with unstable resonator optics
Unstable resonator optics available on GSI Lumonics excimer lasers provide low beam divergence and excellent focused spot quality. The spot profile shown here is formed by a one meter focusing lens. Learn more...
GSI Lumonics Excimer lasers with unstable resonator optics
Our excimer laser attenuator provides very subtle energy control without distorting or deflecting the laser beam.

 

Contact us
For more information, free sample processing, or to answer any questions about these products, call us at (613) 592-6232, fill out our simple contact form below or email us at webinquiry@lightmachinery.com

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K0A 1A0
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