Excimer
Lasers
LightMachinery Excimer Lasers are designed for a wide variety of advanced applications in precision manufacturing and R&D. Micro-machining of polymer and ceramic materials for electronic and medical devices, wire stripping and marking, writing of Fiber-Bragg gratings, pulsed laser deposition (PLD), chemical vapour deposition (CVD), Lidar, photo-resist exposure and photolysis are all common uses for these lasers. Previously produced by GSI Lumonics, these lasers are now developed, manufactured, sold and supported by LightMachinery’s team of engineers and scientists, many of whom have more than twenty years of excimer laser experience.
LightMachinery has established global partnerships with leading distributors and systems integrators that allow us to provide world-class laser and process support to our customers wherever they may be located.
PulseMaster-800
Series
The PulseMaster excimer lasers are designed for medium industrial or R&D applications requiring high power or high energy operation at any of the 193, 248, 308, 351 nm excimer laser wavelengths. The feature highly uniform beam properties, stable energy characteristics and extremely precise pointing stability.
Total Metal Ceramic, TMC™, construction provides for long gas lifetimes and low operating costs. Powerful micro-processor controls stabilize laser output and automate all routine maintenance operations. Standard applications include the manufacture of fiber Bragg gratings for DWDM applications, ablative machining of polymer layers used in flex circuits, micro-machining of hard materials such as ceramics and nitrides, patterning of thin metal layers and machining of medical device plastic components such as catheters and wires.
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IPEX-800
Series
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.
Incorporating LightMachinery’s proprietary ICON™ (Integrated Ceramic on Nickel) technology, IPEX lasers offer long gas lifetimes, superior optical stability and precise control of laser operating parameters.
EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance.
Easy to use, simple to service and economical to operate, IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today. The marking of ceramics shown above is one of many applications for these versatile industrial tools. more...
High Brightness "Unstable Resonator" Optics
Unstable resonator optics are available to provide low beam divergence for applications requiring long distance propagation of the beam or the highest focussability. The beam is flat topped in both axes, with no occlusions, with a divergence of <300 microradians. A significant improvement in spatial coherence (>1mm) is also obtained. This is beneficial in applications involving the use of diffractive optics (e.g. FBG writing, DOE hole drilling).. More...
Excimer Laser Applications |
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Typical of excimer laser stripping of fine gauge wires for hard disk drives. Very clean insulation removal, no loose particles and no damage to the core conductor. This is a gold/copper 47 gage wire, 50 microns in diameter with 8 microns of polyurethane insulation. |
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Heavier Gage wire stripping. 14 gage wire, 2mm in diameter, insulation 12 microns thick. Wire has been stripped only from one side a common requirement that is easily accomplished with the excimer laser. |
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Ceramic chip capacitor marking, very small character sizes, high throughput, good contrast on most ceramics. Excimer marking is normally integrated into an automated test handler. |
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An excellent example of the quality and precision achieved by the excimer laser drilling plastic. This is 75 micorn thick polyamide with 50 micron diameter holes. |
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Aerospace wire marking for Tefzel and Teflon wire. The excimer laser marks are high contrast permanent marks that cannot be removed with solvents. No reduction in insulation strength. |
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Very precise stripping from gold contact pads using an IPEX laser with a highly specialized Offner projection lens to pattern around a dozen devices in one go, with step & repeat for rows of devices. Edges are precise to <1.5µm, and note lack of debris using Coax He nozzle. |
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Test pattern machined with IPEX in Polyimide, bar width is 20µm, credit Olaf Krüger, FBH, Berlin |
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8µm are 8µm pitch grooves in Polycarbonate |
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Catheter slit is a 20 µm wide groove machined though a conductive coating along the length of a 1.8m catheter. There were 4 grooves milled simultaneously and rigorously at 90° by splitting the IPEX beam in 4 |
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Fibre location gooves machined in PMMA using a PM848 at 193nm. Credit to Kris Naessens of INTEC for the photo |
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ZnSe lens array, pitch 6µm, using MAS300 workstation with an IPEX series eximcer laser. Credit to P Gailly, Centre Spatial de Liège, Belgium. |
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Wire stripping of multiple wires, 50um wire diameter, Polyimide insulation |
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Stripping a single 50um wire with polyimide insualtion |
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Spiral slots in a Polyimide tube(prototype polymer stent) around 0.8mm dia. |
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Example of microlens array, 90x50µm lenlsets in PC by Optec OG technique. |
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Applications include marking on contact lenses, flat panel displays. Mark shown here is typical of 2D matrix codes used on flat panel displays and other high value glass substrates. Glass marks are achieved using the excimer laser at 193nm. Dot size is 100 microns |
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Fiber Bragg Gratings (FBGs ) are narrowband reflection filters written permanently into the core of single mode fibers. Wavelength-selective fibers for telecommunications (DWDM) and smart sensors. Normally done with a KrF or ArF excimer laser operating with unstable resonator optics. |
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Unstable resonator optics available on GSI Lumonics excimer lasers provide low beam divergence and excellent focused spot quality. The spot profile shown here is formed by a one meter focusing lens. Learn more... |
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Our excimer laser attenuator provides very subtle energy control without distorting or deflecting the laser beam. |
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us
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